Nanopositioning & Piezo Stages
>> Nanomechanisms, Piezo Stages
Closed-Loop, Piezo-
Driven, Sub-Nanometer Precision
>> Piezo Actuators (PZT
Tranducers)
>> Fast Steering Mirrors, Scan-
ning, Image Stabilization
>> Piezo Drivers & Controllers
>> Ceramic Linear Motors
Nanometrology Sensors
>> Capacitive Sensors Sub-
Nanometer Resolution
Motorized Micropositioning
>> Linear Slides, Linear Actuators
>> Rotary Stages
>> Miniature Translation Stages (PDF)
>> Hexapod 6-Axis: Low-Inertia
Parallel-Kinematics Stages
>> Piezo Motors / Stages
>> Photonics Alignment,
Packaging,Telecom
>> Motion Controllers Servo &
Stepper Motors
>> List of all Products
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>> NanoInnovation Grant™
>> Papers & Technotes
>> Custom Piezo Actuators
>> Custom Nanomechanisms
>> Scanning Microscopy Stages
>> Photonics Solutions
>> Test & Metrology Solutions for
Semiconductor Applications
>> Solutions for Aerospace
Applications
>> Solutions for Astronomy
Applications
>> Solutions for Precision Machining
Applications
>> Piezo University: Piezoelectrics
in Positioning
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>> Dynamic Digital Linearization
Higher Precision for Dynamic
Piezo Applications
>> PILine® Ceramic Servo Motors
>> Parallel-Kinematics, Hexapods:
Low-Inertia Positioning /
Alignment
>> PICMA® Patented Multilayer
Piezo Technology w/ Ceramic
Insulation: Longer Life; Large
Temperature Range; Zero
Outgassing
>> Energy Recovery Piezo Power
Amplifiers; up to 2000 Watts
>> InputShaping®, Eliminates Self
Generated Vibrations
>> Active Trajectory Control,
Provides Motion with Sub-nm
Flatness / Straightness
>> Parallel Metrology Improves
Multi-Axis Accuracy
>> Voice Coil Scanners for Long-
Travel, High-Speed Scanning
>> NanoAutomation®Achieve
Nano-Precision Faster!
>> Sophisticated Control Techniques
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